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Schematics of crystal texture measurement

    An introduction to

EBSD
Backscatter Kikuchi Diffraction
in the Scanning Electron Microscope
("BKD", "ACOM/SEM",
"Orientation Microscopy")


Prof. Dr. Robert Schwarzer
Kappstr. 65
D-71083 Herrenberg
Germany

E-mail: mail@crystaltexture.com

Revised  06 July 2016

    Abstract
    This web site provides a short introduction to Automated Crystal Orientation Microscopy (ACOM), a technique based on Backscatter Kikuchi Diffraction (BKD) in the Scanning Electron Microscope (SEM).

    The technique is often called Electron BackScatter Diffraction (EBSD), in particular when referring to automated commercial systems. However, the acronym "EBSD" or similar abbreviations should not be mistaken for Backscatter Electron Diffraction (BED) in general. Backscatter electron diffraction from bulk surfaces comprises four well-established techniques:

    • Low Energy Electron Diffraction (LEED)
    • Reflection High Energy Electron Diffraction (RHEED)
    • Backscatter Channeling Diffraction (ECP)
    • Backscatter Kikuchi Diffraction (BKD, EBSD).

    EBSD has become very popular in materials science and geology during the last decade. There are several reasons for the success of this novel technique:

    • A wealth of information is obtained about the crystallography and microstructure of bulk polycrystals.
    • The importance of crystal texture and materials' anisotropy has been generally realized.
    • Progress in low-light level camera and computer technology has enabled fast and automated systems.
    • Commercial systems are easy to operate.
    • Specimen preparation is relatively simple.
    • Scanning electron microscopes are widely available in many laboratories.

History

Basics

TKD& EBSD

Pattern Solving

FastEBSD

Imaging Detector

Applications

Conclusions

Publications

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Glossary