EBSD and BKD
The Multi-Array Image Detector

 

 

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Impressum

 

 

    In scanning electron microscopy, backscattered electrons (BSE) can be used, as a complement to secondary electrons (SE), for imaging bulk sample surfaces.  

    If the SEM sample is steeply tilted, as is for example the case in EBSD measurements, to render subtle topographical contrast more visible, to reduce the penetration depth of the primaries, or to perform a Burgers vector analysis on dislocations, the usual BSE detectors on the bottom side of the probe-forming lens are ineffective. Therefore, special backscatter or forward scatter semiconductor diode detectors are occasionally employed, mounted for instance on the margins of the EBSD phosphor screen.  

    EBSD detectors in an EBSD setup

    The EBSD detector by itself, however, can be used as a BSE detector for conventional imaging [1]. In our FastEBSD set-up acquisition boxes can be interactively set and (re-)adjusted on the phosphor screen by tracking with the mouse, at deliberately selected positions and sizes, to optimize contrast [2, 3]. In this way the EBSD detector is employed as a multi-array BSE image detector. High topographical and channeling contrasts and, if applicable, atomic number (Z) contrast is so obtained in the images by evaluating streamed pattern sequences, depending on the sizes and positions of the acquisition boxes. Unlike special semiconductor detectors, the multi-array BSE detector does not further restrict the free space in front of the sample. The images are directly superposable and aligned to EBSD orientation maps and are so ideally suited to digital image processing. The technique is fast, convenient, and inexpensive. 

    The intensity distributions ("EBSD patterns") need not be indexed, therefore BSE imaging by using an EBSD system is applicable to non-crystalline and bioscience materials as well [4, 5].
    __________
    [1]  X. Tao and A. Eades: Another way to implement diffraction contrast in SEM. Microscopy Today 11 (March/April 2003) 36, 38.

    [2]   Download R. Schwarzer, J. Sukkau und J. Hjelen: Imaging of topography and phase distributions with an EBSD detector in the SEM. Microscopy Conference, Kiel 2011, Poster LBP M.P007.  

    [3] R. Schwarzer: Orientation microscopy using the analytical scanning electron microscope. Practical Metallography 51 (2014) 160-179.

    [4]  Download R. Schwarzer and J. Hjelen: The EBSD camera - a multi-array image detector. Oral presentation at AK EBSD Düsseldorf 2014.

    [5]  R.A. Schwarzer and J. Hjelen: Backscattered electron imaging with an EBSD detector. Microscopy Today 23 (2015) 12-17
    http://www.microscopy-today.com/jsp/print_archive/print_archive.jsf#  click on Current Issue Article PDFs in the bottom line

    Present advancements of FastEBSD, in particular concerning combined analytical methods such as EBSD, EDS and EBSD phase-sensitive imaging, can be found on www.ebsd.de (in German).

     


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