EBSD and BKD
Conclusions

 

 

Home
History
Basics
TKD and EBSD
Pattern Solving
FastEBSD
Imaging Detector
Applications
Conclusions
Publications
Further Links &
Downloads

Glossary

  Impressum

 

 


Trends in EBSD hardware


The Scanning Electron Microscope (SEM)

*

Clean vacuum   ==> less contamination

*

Variable Pressure SEM  ==> no charging, no contamination

*

Schottky Field Emission ==> high beam brightness

High current in small probes ==> improved spatial resolution
  
  (but be aware of damaging the specimen and increased contamination rate)

Small beam aperture   ==>   large depth of focus

*

Adequate camera port
(wide, perpendicular to x-y stage movement, low position)

*

External computer control, computer interface


The Acquisition System

*

Actually a digital CCD camera

fast: ~ 1000 frames/sec and more with a GigE Vision

high sensitivity by pixel binning on the chip.

high dynamics (12-14 bit), no flat image for background correction required.

*

Coming up is lensless direct exposure of the sensor chip (high quantum efficiency, low beam voltage).  

 


Home

History

Basics

TKD& EBSD

Pattern Solving

FastEBSD

Imaging Detector

Applications

Conclusions

Publications

Downloads

Glossary